【考案の名称】光学式高精度寸法計測装置

Title:

【考案の名称】光学式高精度寸法計測装置

Document Type and Number:

Japanese Patent JPS5971108

Kind Code:

U

Inventors:

Kiyoshi Matsui
Takeshi Katayama

Application Number:

JP16697482U

Publication Date:

May 15, 1984

Filing Date:

November 05, 1982

Export Citation:

International Classes:

G01B11/02; G01B11/08; (IPC1-7): G01B11/02; G01B11/08

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