Title:
【考案の名称】半導体装置
Document Type and Number:
Japanese Patent JPS60113652
Kind Code:
U
Inventors:
Naomichi Goto
Application Number:
JP8784U
Publication Date:
August 01, 1985
Filing Date:
January 04, 1984
Export Citation:
International Classes:
H01L29/78; H01L21/331; H01L29/41; H01L29/72; H01L29/73; H01L29/737; (IPC1-7): H01L29/44; H01L29/72; H01L29/78