Title:
CHEMICAL REACTION DEVICE FOR VAPOR-PHASE EPITAXIAL GROWTH FOR INP SYSTEM
Document Type and Number:
Japanese Patent JPS6027691
Kind Code:
A
Abstract:
PURPOSE:To prevent formation of a polymer in a gas blender, by equipping a flange set at a gas feed opening of a reaction chamber with a gas blender and a gas feeder having a TEIn feed pipe in a sealing way. CONSTITUTION:The fixing flange 6 is attached to the peripheral part 5 of a gas feed opening at the top of the reactor 1 having the arranged holder 3 supporting the substrate 2, and the funnel-shaped gas blender 7 extending along the centerline of the reactor 1 and the gas feeder 8 having the plural gas inlets 9 and 10 and the TEIn feed pipe 17 passing through the central part of the gas blender and having its tip slightly projected from the outlet of the blender 7 are set on the flange 6. The O rings 13 and 14 are inserted into the channels 11 and 12 set at the top faces of the flange 6 and a flange of the blender 7, and the gas blender 7 and the gas feeder 8 are detachably attached to the flange 6 through the ring-shaped guide plate 15 by the clamping bolt and nut members 16 in a sealing way.
Inventors:
HAYASHI TOSHIO
MAEBANE YOSHIYASU
MAEBANE YOSHIYASU
Application Number:
JP13447783A
Publication Date:
February 12, 1985
Filing Date:
July 25, 1983
Export Citation:
Assignee:
ULVAC CORP
International Classes:
C30B25/14; C30B29/40; H01L21/205; (IPC1-7): C30B29/40; H01L21/205
Attorney, Agent or Firm:
Shigeru Yagita
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