Document Type and Number:
Japanese Patent JPS61123541
Kind Code:
U
Application Number:
JP657585U
Publication Date:
August 04, 1986
Filing Date:
January 21, 1985
Export Citation:
International Classes:
H01L21/683; H01L21/203; H01L21/22; H01L21/316; H01L21/324; H01L21/67; H01L21/68; (IPC1-7): H01L21/68; H01L21/203; H01L21/22; H01L21/316; H01L21/324