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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS61163991
Kind Code:
U
Application Number:
JP3563285U
Publication Date:
October 11, 1986
Filing Date:
March 12, 1985
Export Citation:
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International Classes:
G01R31/26; H01L21/66; (IPC1-7): G01R31/26; H01L21/66