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Document Type and Number:
Japanese Patent JPS61167654
Kind Code:
U
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Application Number:
JP5108385U
Publication Date:
October 17, 1986
Filing Date:
April 08, 1985
Export Citation:
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International Classes:
G03F7/20; (IPC1-7): G03F7/20
Domestic Patent References:
JPS58145949A1983-08-31
JPS5628612A1981-03-20
JPS49103703A1974-10-01
JPS5544927A1980-03-29



 
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