Document Type and Number:
Japanese Patent JPS61190401
Kind Code:
U
Application Number:
JP7499385U
Publication Date:
November 27, 1986
Filing Date:
May 22, 1985
Export Citation:
International Classes:
F01D5/14; C23C14/06; F01D5/28; (IPC1-7): F01D5/28; F01D5/14
Domestic Patent References:
JP55132302B | ||||
JPS5843601U | 1983-03-24 | |||
JPS5963305A | 1984-04-11 | |||
JPS5993866A | 1984-05-30 | |||
JPS58113503A | 1983-07-06 |