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Document Type and Number:
Japanese Patent JPS61205140
Kind Code:
U
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Application Number:
JP8978885U
Publication Date:
December 24, 1986
Filing Date:
June 14, 1985
Export Citation:
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International Classes:
H01L21/68; G01R1/067; H01L21/66; (IPC1-7): H01L21/66; G01R1/067



 
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