Document Type and Number:
Japanese Patent JPS6130283
Kind Code:
Y2
Application Number:
JP13441781U
Publication Date:
September 05, 1986
Filing Date:
September 09, 1981
Export Citation:
International Classes:
H01L21/68; H01L21/67; H01L21/683; (IPC1-7): H01L21/68
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