Document Type and Number:
Japanese Patent JPS6134255
Kind Code:
B2
Inventors:
YAMANAKA YOJI
WADA TOSHIO
WADA TOSHIO
Application Number:
JP10754376A
Publication Date:
August 06, 1986
Filing Date:
September 08, 1976
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H01L29/78; H01L21/3205; H01L21/336; H01L23/52
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