Document Type and Number:
Japanese Patent JPS6142894
Kind Code:
B2
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Inventors:
ENOMOTO TADAYOSHI
Application Number:
JP16084078A
Publication Date:
September 24, 1986
Filing Date:
December 19, 1978
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H03H15/02; H01L29/76; H01L29/772; H01L29/78; H03H15/00
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