Document Type and Number:
Japanese Patent JPS6151940
Kind Code:
B2
Abstract:
In an installation for treating workpieces by a glow discharge in a mixture of gases, the gas pressure is detected and valves for the various gases are cyclically and symmetrically opened and closed by amounts relative to the volumetric ratio of the gases.
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Inventors:
MARUTEIN HERUTAA
UERUNAA OTSUPERU
UERUNAA OTSUPERU
Application Number:
JP4879280A
Publication Date:
November 11, 1986
Filing Date:
April 15, 1980
Export Citation:
Assignee:
KLOECKNER IONON
International Classes:
B01F23/10; G05D11/13