Document Type and Number:
Japanese Patent JPS62106782
Kind Code:
U
Application Number:
JP20134385U
Publication Date:
July 08, 1987
Filing Date:
December 25, 1985
Export Citation:
International Classes:
H01L21/677; B25J15/06; H01L21/67; H01L21/68; H05K13/02; H05K13/04; (IPC1-7): B25J15/06; H01L21/68; H05K13/02; H05K13/04