Document Type and Number:
Japanese Patent JPS62109345
Kind Code:
U
Application Number:
JP20079085U
Publication Date:
July 13, 1987
Filing Date:
December 27, 1985
Export Citation:
International Classes:
G01N27/62; H01J49/04; H01J49/10; (IPC1-7): H01J49/10; G01N27/62; H01J49/04