Document Type and Number:
Japanese Patent JPS62120345
Kind Code:
U
Application Number:
JP771686U
Publication Date:
July 30, 1987
Filing Date:
January 24, 1986
Export Citation:
International Classes:
H01L21/306; B29C39/10; G01R31/26; H01L21/56; H01L21/66; B29L31/34; (IPC1-7): H01L21/306; B29C39/10; B29L31:34; H01L21/66
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