Document Type and Number:
Japanese Patent JPS62153198
Kind Code:
U
Application Number:
JP4193786U
Publication Date:
September 29, 1987
Filing Date:
March 24, 1986
Export Citation:
International Classes:
B63B15/02; B63B15/00; B63B29/02; (IPC1-7): B63B15/00; B63B29/02
Previous Patent: PRODUCTION OF SINGLE CRYSTAL AND DEVICE THEREFOR
Next Patent: GASEOUS-PHASE ETCHING DEVICE FOR III-V COMPOUND SEMICONDUCTOR
Next Patent: GASEOUS-PHASE ETCHING DEVICE FOR III-V COMPOUND SEMICONDUCTOR