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Document Type and Number:
Japanese Patent JPS62178554
Kind Code:
U
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Application Number:
JP6590886U
Publication Date:
November 12, 1987
Filing Date:
April 30, 1986
Export Citation:
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International Classes:
H01L35/32; H01L21/60; H01L35/34; (IPC1-7): H01L35/34; H01L21/60
Domestic Patent References:
JPS6076179A1985-04-30
JPS572679B21982-01-18
JPS60189942A1985-09-27



 
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