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Document Type and Number:
Japanese Patent JPS62191874
Kind Code:
U
More Like This:
JP2013100207REGENERATING METHOD OF MEMBER USED FOR MANUFACTURING PERIODIC TABLE GROUP 13 METAL NITRIDE SEMICONDUCTOR CRYSTAL, AND MANUFACTURING METHOD OF PERIODIC TABLE GROUP 13 METAL NITRIDE SEMICONDUCTOR CRYSTAL
Application Number:
JP7999986U
Publication Date:
December 05, 1987
Filing Date:
May 27, 1986
Export Citation:
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International Classes:
C30B19/06; C30B29/40; C30B29/42; H01L21/208; (IPC1-7): C30B19/06; C30B29/40; C30B29/42; H01L21/208



 
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