Document Type and Number:
Japanese Patent JPS62201932
Kind Code:
U
Application Number:
JP9078586U
Publication Date:
December 23, 1987
Filing Date:
June 14, 1986
Export Citation:
International Classes:
H01L21/324; H01L21/67; H01L21/68; H01L21/683; (IPC1-7): H01L21/324; H01L21/68
Domestic Patent References:
JPS5749248A | 1982-03-23 | |||
JPS5737848A | 1982-03-02 | |||
JPS6176957U | 1986-05-23 |