Document Type and Number:
Japanese Patent JPS6251145
Kind Code:
B2
Inventors:
SAITO JUN
ONO HIROSHI
KOIZUMI SHIRO
MITSUISHI TAKATOSHI
ONO HIROSHI
KOIZUMI SHIRO
MITSUISHI TAKATOSHI
Application Number:
JP7715480A
Publication Date:
October 28, 1987
Filing Date:
June 10, 1980
Export Citation:
Assignee:
MITSUI TOATSU CHEMICALS
International Classes:
B01J49/00; B01J39/04; C07C67/00; C07C239/00; C07C279/02
Previous Patent: A surface treatment device and a surface treatment method
Next Patent: ION IMPLANTATION METHOD
Next Patent: ION IMPLANTATION METHOD