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Document Type and Number:
Japanese Patent JPS6259890
Kind Code:
B2
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Inventors:
NAKAO KAZUNARI
FUJII MASAO
TETSUNO HARUO
Application Number:
JP20864981A
Publication Date:
December 14, 1987
Filing Date:
December 22, 1981
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L23/44; F25B23/00; F28F13/06; H01L23/427



 
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