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Document Type and Number:
Japanese Patent JPS6274334
Kind Code:
U
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Application Number:
JP16517185U
Publication Date:
May 13, 1987
Filing Date:
October 29, 1985
Export Citation:
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International Classes:
H01L21/52; H01L21/58; H01L21/60; H01L23/48; H01L23/50; (IPC1-7): H01L21/60; H01L21/58; H01L23/48



 
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