Document Type and Number:
Japanese Patent JPS6285566
Kind Code:
U
Application Number:
JP17887285U
Publication Date:
June 01, 1987
Filing Date:
November 20, 1985
Export Citation:
International Classes:
H01L31/04; E03B7/10; F16K17/38; F16K31/02; (IPC1-7): E03B7/10; F16K17/38; F16K31/02; H01L31/04