Document Type and Number:
Japanese Patent JPS63118903
Kind Code:
U
Application Number:
JP1015587U
Publication Date:
August 01, 1988
Filing Date:
January 27, 1987
Export Citation:
International Classes:
B08B3/08; B01D5/00; B01D53/34; B01D53/44; B01D53/74; H01L21/304; (IPC1-7): B01D5/00; B08B3/08; H01L21/304
Domestic Patent References:
| JPS6214901A | 1987-01-23 | |||
| JPS482874A |