Document Type and Number:
Japanese Patent JPS63176257
Kind Code:
U
Application Number:
JP6530387U
Publication Date:
November 15, 1988
Filing Date:
May 01, 1987
Export Citation:
International Classes:
H01J23/00; H01J7/24; H01J23/087; (IPC1-7): H01J23/087; H01J7/24; H01J23/00