Document Type and Number:
Japanese Patent JPS6334281
Kind Code:
Y2
Application Number:
JP124781U
Publication Date:
September 12, 1988
Filing Date:
January 07, 1981
Export Citation:
International Classes:
H01L23/08; H01L21/60; H01L23/02; H01L23/48; (IPC1-7): H01L23/48
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