Document Type and Number:
Japanese Patent JPS6356710
Kind Code:
B2
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Inventors:
MIMURA TAKASHI
Application Number:
JP14998981A
Publication Date:
November 09, 1988
Filing Date:
September 22, 1981
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L29/80; H01L21/331; H01L21/338; H01L29/205; H01L29/73; H01L29/778; H01L29/78; H01L29/812