Document Type and Number:
Japanese Patent JPS6356825
Kind Code:
B2
Inventors:
TAKEUCHI MAKOTO
Application Number:
JP7791186A
Publication Date:
November 09, 1988
Filing Date:
April 04, 1986
Export Citation:
Assignee:
NIPPON ELECTRON OPTICS LAB
International Classes:
B04B5/04; B04B5/00; B04B11/02; F16L27/08; F16L37/00; F16L39/04
Previous Patent: A method for washing the device and its processing chamber for processing a flexible substrate
Next Patent: DRAW TYPE OPTICAL DISK
Next Patent: DRAW TYPE OPTICAL DISK