Document Type and Number:
Japanese Patent JPS6377683
Kind Code:
U
Application Number:
JP17271586U
Publication Date:
May 23, 1988
Filing Date:
November 12, 1986
Export Citation:
International Classes:
H01L21/66; B07C5/36; B65G47/64; B65G65/32; H05K13/02; (IPC1-7): B07C5/36; B65G47/64; B65G65/32; H01L21/66; H05K13/02