Document Type and Number:
Japanese Patent JPS6385668
Kind Code:
U
Application Number:
JP18076486U
Publication Date:
June 04, 1988
Filing Date:
November 25, 1986
Export Citation:
International Classes:
C30B15/14; C30B29/06; C30B29/08; C30B29/42; H01L21/18; (IPC1-7): C30B15/14; C30B29/06; C30B29/08; C30B29/42; H01L21/18