Title:
４チャンネルガス送出システム
Document Type and Number:
Japanese Patent JP5886970
Kind Code:
B2
Abstract:
A four channel gas delivery system. The system comprises an inlet channel; four outlet channels; four control valves, each valve being arranged so as to control the flow from the inlet channel through a corresponding one of the outlet channels; and a flow ratio control system. The flow ratio control system includes two dual antisymmetric optimal (DAO) control modules. The DAO control modules are configured and arranged so as to control the respective control valves so as to control the relative ratios of flow from the inlet channel through the four outlet channels. The flow ratio control system also includes a virtual DAO control module configured and arranged so as to control the ratio of flow between the two DAO control modules.
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Inventors:
Din, Yunha
Application Number:
JP2014534611A
Publication Date:
March 16, 2016
Filing Date:
September 28, 2012
Export Citation:
Assignee:
MKS INSTRUMENTS,INCORPORATED
International Classes:
G05D11/13; G05D7/06; H01L21/205; H01L21/3065; H01L21/31
Domestic Patent References:
| JP2010519648A | ||||
| JP2008538656A |
Attorney, Agent or Firm:
Hiroaki Sakai