Title:
ガラス基板用研磨液組成物
Document Type and Number:
Japanese Patent JP5283247
Kind Code:
B2
Inventors:
Kazuhiko Nishimoto
Yasuhiro Yoneda
Mami Shirota
Yasuhiro Yoneda
Mami Shirota
Application Number:
JP2006335791A
Publication Date:
September 04, 2013
Filing Date:
December 13, 2006
Export Citation:
Assignee:
Kao Corporation
International Classes:
C09K3/14; B24B37/00; B82Y99/00
Domestic Patent References:
| JP2001064631A | ||||
| JP2006167817A | ||||
| JP2006193695A | ||||
| JP10102042A | ||||
| JP11188614A | ||||
| JP2000313815A | ||||
| JP10102041A | ||||
| JP2006179678A | ||||
| JP11293231A |
Attorney, Agent or Firm:
Yoshinori Hosoda