ABRASIVE LIQUID FEEDING DEVICE AND ABRASIVE LIQUID FEEDING METHOD

Title:

ABRASIVE LIQUID FEEDING DEVICE AND ABRASIVE LIQUID FEEDING METHOD

Document Type and Number:

Japanese Patent JPH10175166

Kind Code:

A

Abstract:

To provide an abrasive liquid feeding device and an abrasive liquid feeding method in which the device can be made in a small size, and at the same time, the exchanging frequency of an original liquid bottle can be reduced.

This device is provided with an original liquid feeding means 10 to feed the original liquid of an abrasive liquid used for polishing the surface of a polishing object; a diluent feeding means 20 to feed a diluent to dilute the original liquid; a regulating tub 30 to store an abrasive liquid made by mixing the original liquid fed form the original liquid feeding means 19, and the diluent fed from the diluent feeding means 20 to form a desired density, and at the same time, to feed the stored abrasive liquid to the polishing object. Between the original liquid feeding means 10 and the regulating tub 31, a measuring tub 41 to measure the amount of the original liquid and to feed it to the regulating tub 31 is provided. To the measuring tub 41, the diluent from the diluent feeding means 20 is also fed.

Inventors:

KAWASHIMA KIYOTAKA
SHIGETA KENICHI
IGUCHI KOJI

Application Number:

JP35306996A

Publication Date:

June 30, 1998

Filing Date:

December 13, 1996

Export Citation:

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Assignee:

EBARA CORP
TOSHIBA CORP

International Classes:

B24B57/02; G05D11/13; G05D21/00; (IPC1-7): B24B57/02; G05D11/13; G05D21/00

Domestic Patent References:

JPH0647649A	1994-02-22
JPH0752045A	1995-02-28

Attorney, Agent or Firm:

Takashi Kumagai (1 outside)

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