研磨材混合流体研磨装置及び研磨方法

Title:

研磨材混合流体研磨装置及び研磨方法

Document Type and Number:

Japanese Patent JP5477739

Kind Code:

B2

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Inventors:

Takashi Ueda
Tatsuaki used books
Akira Hosokawa
Ryutaro Tanaka

Application Number:

JP2009221001A

Publication Date:

April 23, 2014

Filing Date:

September 25, 2009

Export Citation:

Assignee:

Kanazawa University

International Classes:

B24B31/00; B29C33/04; B29C33/38

Domestic Patent References:

Attorney, Agent or Firm:

Kaichi Otani

Previous Patent: JPS5477738

Next Patent: JPS5477740