Title:
研磨材混合液体研磨装置、それを用いた研磨方法及び研磨材混合液体研磨装置の砥粒分離用積層金網フィルタ
Document Type and Number:
Japanese Patent JP7083213
Kind Code:
B2
Abstract:
To provide an abrasive material mixed liquid polishing device which has a high durability and is industrially practicable, and a polishing method with use thereof.SOLUTION: One of a pair of storage tanks 3, which are connected to one opening 2a and the other opening 2b of a metal mold hollow part 2 respectively, is increased in pressure, an abrasive material mixed liquid is forcibly flown into the metal mold hollow part 2, the forcibly in-flown abrasive material mixed liquid is returned to the other storage tank 3. At this time, abrasive grains in the abrasive material mixed liquid are separated by abrasive grain separation means 8, and are not flown into a pressure reduction side fluid channel 7 which is communicated with the abrasive grain separation means 8 and a pressure reduction side fluid pressure generating cylinder 4c. Further, by polishing an inside surface of the metal mold hollow part 2, inevitably generated metal scraps are flown into the pressure reduction side storage tank 3 together with the abrasive material mixed liquid, are precipitated in the storage tank 3 and are adsorbed by metal scrap adsorption means.SELECTED DRAWING: Figure 1
Inventors:
Tatsuo Kobayashi
Atsushi Kaneko
Atsushi Kaneko
Application Number:
JP2017201567A
Publication Date:
June 10, 2022
Filing Date:
October 18, 2017
Export Citation:
Assignee:
Sanko Gosei Co., Ltd.
International Classes:
B24B31/00; B24B31/12; B24B57/02; B29C33/72
Domestic Patent References:
| JP2011067902A | ||||
| JP2003260653A | ||||
| JP3170134U | ||||
| JP2001353640A | ||||
| JP2012248569A | ||||
| JP2002001661A |
Attorney, Agent or Firm:
Akira Muneaki
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