Title:
研磨材再生方法
Document Type and Number:
Japanese Patent JP5858050
Kind Code:
B2
Abstract:
The problem addressed by the present invention is to provide: an abrasive material regeneration method that, by means of an efficient method, recovers cerium oxide from used abrasive material having cerium oxide as the primary component, and then can obtain a regenerated abrasive material by means of a simple method; and a regenerated abrasive material. The abrasive material regeneration method regenerates a cerium oxide abrasive material from a used abrasive material slurry containing the cerium oxide abrasive material and resulting from grinding a grinding subject having silicon as the primary component, and is characterized by regenerating the abrasive material containing cerium oxide through: a slurry recovery step (A) for recovering an abrasive material slurry discharged from a grinder; an isolation/concentration step (B) for adding a magnesium salt as an inorganic salt to the recovered abrasive material slurry, aggregating the abrasive material under the condition that the pH value of the mother liquor converted to 25 DEG C is at least 6.5 and less than 10.0, and thus isolating and concentrating the abrasive material from the mother liquor; and an abrasive material recovery step (C) for recovering the isolated and concentrated abrasive material.
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Inventors:
Atsushi Takahashi
Yuki Nagai
Akihiro Maezawa
Yuki Nagai
Akihiro Maezawa
Application Number:
JP2013550205A
Publication Date:
February 10, 2016
Filing Date:
December 05, 2012
Export Citation:
Assignee:
Konica Minolta Co., Ltd.
International Classes:
B24B57/00; C02F11/00; C02F11/14; C09K23/52; H01L21/304
Domestic Patent References:
| JP2000254659A | ||||
| JP2011041876A | ||||
| JP2004306210A | ||||
| JP2001308043A |
Attorney, Agent or Firm:
Gwangyang International Patent Office