PURPOSE: To decrease a given space through reduction of the height of each electromagnet in a position where electromagnet trains cross each other and to save a power consumption through the decrease of the number of windings of a coil.
CONSTITUTION: A demagnetizing coil 3 of a common electromagnet positioned in the intersection between one and an other electromagnet train is switcheable and connectable to a magnetic pole coil 3a or 3b in the one or the other electromagnet train by means of a switching means 4. In this way, conveyance of a levitating body passing through a position above the one electromagnet train from a position above the other electromagnet train is practicable and the height of a common electromagnet can be reduced compared with that of a conventional device. Thereby, adaptation to a manufacturing device for a semiconductor the space of which is often limited becomes advantageous. Further, since magnetic resistance of a coil is low, the number of windings of a coil is decreased and saving of a consumption power can take place.
KAWADA NORIYUKI
NAKAJIMA MOTOMI
MORII SHIGEKI
