Title:
加速度測定装置および加速度測定方法
Document Type and Number:
Japanese Patent JP7407617
Kind Code:
B2
Abstract:
To achieve an acceleration measurement device and acceleration measurement method that correctly make a temperature compensation of an acceleration sensor without having a temperature sensor built in the acceleration sensor.SOLUTION: A charge amplifier is provided with: an amplifier circuit 21 that receives a detection signal of an acceleration sensor via a transmission cable, and outputs an output signal obtained by amplifying the detection signal; and a calculation unit 22 that derives acceleration on the basis of the output signal. The charge amplifier is further provided with a superimposed signal source V2 that outputs a known superimposed signal; and a switch part SW1 that superimposes the superimposed signal on the detection signal. The calculation unit 22 is configured to: control the switch part SW1; (a) derive an electrostatic capacitance of an acceleration sensor 1 from an output signal obtained in a state with the superimposed signal superimposed on the detection signal; and (b) derive acceleration from the output signal while making a temperature compensation on the basis of the derived electrostatic capacitance.SELECTED DRAWING: Figure 4
Inventors:
Kazuhiro Shimomura
Application Number:
JP2020028856A
Publication Date:
January 04, 2024
Filing Date:
February 21, 2020
Export Citation:
Assignee:
Rion Co., Ltd.
International Classes:
G01P21/02
Domestic Patent References:
| JP2011169783A | ||||
| JP200485562A | ||||
| JP6347355A |
Attorney, Agent or Firm:
Osamu Aoki