To provide an acceleration sensor with a self-diagnosing function having small number of components and easy manufacture without necessity of applying a high voltage.
The acceleration sensor comprises a weight 3 at the center of an operating mechanism 2 having a diaphragm 2D including resistance elements RX, RY, RZ integrally provided therein in a structure for detecting an acceleration or a force based on the resistance value changes of the elements RX, RY, RZ due to the elongation or contraction of the diaphragm 2D in the case of applying the acceleration or force. Heating resistance elements RA, RB capable of being energized are integrally formed in the diaphragm 2D, and the elements RA, RB displace to elongate or contract the diaphragm 2S by energizing the elements RA, RB.
NEZU MASAHIRO
NAYA ROKURO
SUZUKI SHOGO
NIPPON INTER ELECTRONICS CORP