Title:
ACCELERATION SENSOR
Document Type and Number:
Japanese Patent JP2015141102
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of reducing variation in output of self-diagnosis.SOLUTION: The acceleration sensor includes: a support base plate; a weight; a beam one end of which is connected to the support base plate and the other end of which is connected to the weight; an opposing plate disposed being opposed to the weight; a first self-diagnostic electrode formed on a one principal plane of the weight in a thickness direction thereof; a second self-diagnostic electrode which is disposed on the opposing plate being opposed to the first self-diagnostic electrode. The first self-diagnostic electrode is an acceleration sensor which is formed over generally entire plane of the one principal plane of the weight.
Inventors:
NAKATSUKA HIROSHI
FUJII TAKAHIRO
IMANAKA TAKASHI
AIZAWA HIROYUKI
SAKAGAMI TAKESHI
OKAMOTO RIE
YOKOTA TAKESHI
FUJII TAKAHIRO
IMANAKA TAKASHI
AIZAWA HIROYUKI
SAKAGAMI TAKESHI
OKAMOTO RIE
YOKOTA TAKESHI
Application Number:
JP2014014034A
Publication Date:
August 03, 2015
Filing Date:
January 29, 2014
Export Citation:
Assignee:
PANASONIC IP MAN CORP
International Classes:
G01P21/00; G01P15/12; G01P15/18
Attorney, Agent or Firm:
Kentaro Fujii
Kenji Kamada
Hiroo Maeda
Kenji Kamada
Hiroo Maeda