Title:
加速度センサ
Document Type and Number:
Japanese Patent JP5304652
Kind Code:
B2
Abstract:
An acceleration sensor includes a driver circuit for outputting a biased alternating-current (AC) voltage having a variable bias voltage, a detector element having a capacitance provided between a fixed electrode and a movable electrode changing depending on acceleration applied to the detector element, a current-voltage (C/V) converter for converting a current output from the movable electrode of the detector element into a voltage and outputting the voltage, a first operational amplifier outputting a voltage depending on the input voltage, a synchronous demodulator for synchronously detecting the voltage output from the first operational amplifier, and a defect detector for outputting a defect detection signal when the defect detector determines that the voltage output from the first operational amplifier is out of a predetermined range while the biased AC voltage output from the driver circuit is a predetermined voltage. This acceleration sensor can have a small size.
Inventors:
Isao Hattori
Toshiyuki Nozoe
Toshiyuki Nozoe
Application Number:
JP2009532627A
Publication Date:
October 02, 2013
Filing Date:
April 01, 2009
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
G01P15/125; G01P21/00
Domestic Patent References:
| JPH11118827A | 1999-04-30 | |||
| JP2000081449A | 2000-03-21 | |||
| JP2007248327A | 2007-09-27 | |||
| JP2001221810A | 2001-08-17 | |||
| JP2004347530A | 2004-12-09 | |||
| JP2004061280A | 2004-02-26 | |||
| JP2000081449A | 2000-03-21 | |||
| JPH11118827A | 1999-04-30 | |||
| JPH10104267A | 1998-04-24 | |||
| JP2007285936A | 2007-11-01 | |||
| JPH11258092A | 1999-09-24 |
Attorney, Agent or Firm:
Hiroki Naito
Kentaro Fujii
Ikuro Terauchi
Kentaro Fujii
Ikuro Terauchi