Title:
加速度センサ
Document Type and Number:
Japanese Patent JP5799942
Kind Code:
B2
Inventors:
Toshihisa Suzuki
Application Number:
JP2012258586A
Publication Date:
October 28, 2015
Filing Date:
November 27, 2012
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
G01P15/125; B81B3/00; G01P15/08; G01P15/18; H01L29/84
Domestic Patent References:
| JP2011152592A | ||||
| JP3489505B2 | ||||
| JP3729192B2 | ||||
| JP5319122B2 | ||||
| JP2012163415A | ||||
| JP5285540B2 |
Attorney, Agent or Firm:
Samejima Mutsumi
Kyousei Tamura
Yoshida Tamaki
Kyousei Tamura
Yoshida Tamaki