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Title:
加速度センサ
Document Type and Number:
Japanese Patent JP5930127
Kind Code:
B2
Inventors:
Hamamura Hiroshi
Application Number:
JP2015521358A
Publication Date:
June 08, 2016
Filing Date:
May 14, 2014
Export Citation:
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Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
G01P15/12; B81B3/00; G01P15/08; G01P21/00; H01L29/84
Domestic Patent References:
JPH10123167A1998-05-15
JPH09304426A1997-11-28
JPH07325105A1995-12-12
JPH0743381A1995-02-14
JPH0593738A1993-04-16
JPH0413975A1992-01-17
JPH01163673A1989-06-27
Attorney, Agent or Firm:
Kaede International Patent Office



 
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