PURPOSE: To improve a detection characteristic by a construction wherein a presser plate suppressing the deformation of an elastic plate is provided on the elastic plate except for a cantilever and a part of a strain detecting means.
CONSTITUTION: A presser plate 25 is bonded on a diaphragm plate 1. The presser plate 25 is formed of a metal material having a rigidity rate of a prescribed value or above and is shaped in a circle having a smaller diameter than the diaphragm plate 1, and in the center thereof, a rectangular relief hole 27 is formed with a prescribed space from the outside of a slit 3 so that it surrounds the slit. Thereby the rolling-up of the diaphragm plate 1 and a bend occurring in punching of a cantilever 5 are suppressed by the presser plate 25 and the planeness of the diaphragm plate 1 is obtained. Besides, the presser plate 25 applies a pressure so that a load may not be applied on a strain gage resistance element 19, and therefore the application of an initial load on a gage 15 is prevented. Accordingly, a bridge balance of the gage 15 is maintained stably, deterioration in characteristics at the time of no load is suppressed, and the bending of the cantilever 5 in relation to an input acceleration can be varied linearly. Therefore, the linearity in relation to the acceleration can be maintained, while a mechanical hysteresis characteristic is improved.
FUKUDA TAKESHI
HONGO YOICHI
NILES PARTS CO LTD