PURPOSE: To provide a new acceleration sensor having higher sensitivity higher than that of the acceleration sensor heretofore used.
CONSTITUTION: In the vacuum cavity 40 of an acceleration sensor, a mobile section 42 which is displaced when acceleration is applied is provided and an electron generating source 44, deflecting electrode section 46, and electron detector 58 are arranged in a line. The section 46 is constituted of a mobile electrode set on the surface of the mobile section 42 and a fixed electrode 56 counterposed to the electrode 54. An electron beam is deflected by the electric field between the electrodes 54 and 56. The multiple electrodes 60 constituting the detector 58 are arranged in an electron beam arriving area. Since a positive voltage is applied across the electrodes 60, an electric current flows between the electrodes 60 when electrons arrive at the area.
KAKINUMA HIROAKI
MORI MIKIO
TAJIMA TSUTOMU
