Title:
加速度センサ、および加速度検出装置
Document Type and Number:
Japanese Patent JP5034043
Kind Code:
B2
Inventors:
Tomoyuki Tsuchiya
Application Number:
JP2006242852A
Publication Date:
September 26, 2012
Filing Date:
September 07, 2006
Export Citation:
Assignee:
Kyoto University
International Classes:
G01P15/18; G01P15/125; H01L29/84
Domestic Patent References:
| JP2003337138A | ||||
| JP2002131331A | ||||
| JP2003294782A |
Attorney, Agent or Firm:
Shiro Nakajima
Shuji Matsumura
Kobayashi Kunito
Shuji Matsumura
Kobayashi Kunito