Title:
弾性波装置、分波器および通信装置
Document Type and Number:
Japanese Patent JP7278305
Kind Code:
B2
Abstract:
An elastic wave device includes a substrate, a multilayer film located on the substrate, a piezoelectric layer located on the multilayer film, resonators located on the piezoelectric layer and including an IDT electrode, and a protective film located on the resonators. The resonators include a first resonator and a second resonator having a higher resonant frequency than the first resonator. A thickness of the protective film on the first resonator is larger than the thickness of the protective film on the second resonator.
Inventors:
Miki Ito
Application Number:
JP2020556691A
Publication Date:
May 19, 2023
Filing Date:
October 03, 2019
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
H03H9/145; H03H9/64
Domestic Patent References:
| JP6152299A | ||||
| JP2000196409A | ||||
| JP9270661A |
Foreign References:
| WO2018154950A1 | ||||
| WO2018198654A1 | ||||
| WO2018097201A1 | ||||
| WO2017131170A1 | ||||
| WO2012176455A1 |
Attorney, Agent or Firm:
Yasuhiro Iijima
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