Title:
ACOUSTIC WAVE DEVICE AND HIGH-FREQUENCY FILTER USING THE SAME
Document Type and Number:
Japanese Patent JP2010011440
Kind Code:
A
Abstract:
To provide a boundary acoustic wave device which is compact and excellent in temperature stability, possesses excellent Q-value, and features low cost.
A boundary acoustic wave device is obtained by patterning a comb electrode with a film thickness of hm and an electrode finger period of , whose main ingredient is aluminum, and a shorting reflector (thickness hr) onto the surface of a YX-LN single crystalline piezoelectric substrate, and then by forming a silicon oxide film with a film thickness of h1 and an aluminum nitride film 6 with a film thickness of h2 on the comb electrode and the reflector, wherein: 2.5hr/8.5%.
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Inventors:
ISOBE ATSUSHI
ASAI KENGO
ASAI KENGO
Application Number:
JP2009071611A
Publication Date:
January 14, 2010
Filing Date:
March 24, 2009
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H03H9/145; H03H9/25; H03H9/64
Domestic Patent References:
JP2004112748A | 2004-04-08 | |||
JP2006279609A | 2006-10-12 | |||
JP2007267366A | 2007-10-11 |
Foreign References:
WO1998052279A1 | 1998-11-19 | |||
WO2006114930A1 | 2006-11-02 |
Attorney, Agent or Firm:
Polaire Patent Business Corporation
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