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Title:
アクリル酸エステル誘導体、高分子化合物およびフォトレジスト組成物
Document Type and Number:
Japanese Patent JP5722904
Kind Code:
B2
Abstract:
The invention provides a novel acrylic ester derivative which can form a structural unit of a polymer to be incorporated into a photoresist composition; a polymer produced through polymerization of a raw material containing the acrylic ester derivative; and a photoresist composition which contains the polymer and which, as compared with the case of conventional ones, realizes formation of a high-resolution resist pattern having improved LWR. Specifically, the present invention provides, for example, an acrylic ester derivative represented by the following formula (1): wherein R1 represents a hydrogen atom, a methyl group, or a trifluoromethyl group; each of R2, R3, R5, R7, R8, and R10 represents a hydrogen atom, an alkyl group, a cycloalkyl group, or an alkoxy group; each of R4 and R6 represents a hydrogen atom, an alkyl group, a cycloalkyl group, or an alkoxy group, or R4 and R6 are linked together to form an alkylene group, —O—, or —S—; R9 represents a hydrogen atom, an alkyl group, a cycloalkyl group, an alkoxy group, or —COOR11; R11 represents an alkyl group; X represents —O— or >N—R12; R12 represents a hydrogen atom or an alkyl group; Y represents >C═O or >S(═O)n; n is an integer of 0 to 2; and the wavy lines represent that either R8 or R9 may be in an endo or exo position.

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Inventors:
Osamu Nakayama
Yada Manabu
Application Number:
JP2012532959A
Publication Date:
May 27, 2015
Filing Date:
September 02, 2011
Export Citation:
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Assignee:
KURARAY CO.,LTD.
International Classes:
C07D209/56; C07D327/04; C07D497/18; C08F20/36; G03F7/039
Domestic Patent References:
JP2011215414A2011-10-27
JPH10221852A1998-08-21
JPH11109628A1999-04-23
JPH10232495A1998-09-02
JP2000047386A2000-02-18
JP2010168523A2010-08-05
JP2011215414A2011-10-27
JPH10221852A1998-08-21
JPH11109628A1999-04-23
JPH10232495A1998-09-02
JP2000047386A2000-02-18
Foreign References:
CH283612A1952-06-15
FR1392029A1965-03-12
FR2166276A11973-08-17
GB533718A1941-02-19
US2151733A1939-03-28
Attorney, Agent or Firm:
Tamotsu Otani
Makoto Kataoka



 
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