Title:
アクティブ除振装置および露光装置
Document Type and Number:
Japanese Patent JP4109747
Kind Code:
B2
Abstract:
An anti-vibration table having a structure supporting a movable stage is supported by an air spring actuator. The control system of the air spring actuator has a position feedback system for positioning the anti-vibration table at a predetermined equilibrium position on the basis of the position detection signal of the anti-vibration table, an acceleration feedback system for imparting damping characteristics to the anti-vibration table on the basis of the acceleration detection signal of the anti-vibration table, and an applied pressure feedback system for controlling the applied pressure of the air spring actuator. A correction signal for correcting a tilt of the anti-vibration table, which is generated when the stage on the anti-vibration table moves, is generated on the basis of a signal from a laser interferometer for detecting the position of the stage, and feedforward-input to the applied pressure feedback system.
Inventors:
Wakui Shinji
Application Number:
JP13924298A
Publication Date:
July 02, 2008
Filing Date:
May 07, 1998
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/22; G05D19/02; F16F15/02; G03F7/20; G05B13/02; H01L21/027
Domestic Patent References:
| JP10110776A | ||||
| JP4244628A |
Attorney, Agent or Firm:
Kazunori Saito
Tetsuya Ito
Tetsuya Ito